Quartz Boat

product details

The 8 inch high purity quartz wafer boat is specifically engineered for secure and contamination-free handling of 200 mm wafers in high-temperature semiconductor manufacturing processes. Made from ultra-pure fused quartz, it exhibits outstanding thermal stability, low impurity levels, and excellent resistance to aggressive process gases.

With precise wafer slots and reinforced structural integrity, this boat ensures consistent wafer spacing and alignment, enabling uniform gas flow and heat distribution within oxidation, diffusion, and LPCVD furnace environments. Its smooth surface finish minimizes particle generation and supports cleanroom-grade performance.

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  • No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province

  • +86-572-3032373

    +86-572-3033016

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After 32 years of development and accumulation of technology.

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