Reaction Tubes
Name:
8-inch Quartz Reaction Tube
Function & Application:
The 8-inch quartz reaction tube is a core component for achieving high-temperature processes in semiconductor manufacturing. With its extreme temperature resistance, chemical inertness, and precise thermal field control capabilities, it plays critical roles in key processes such as monocrystalline silicon growth support, thermal treatment environment creation, corrosion protection, and maintaining ultra-high purity. It is applied in wafer manufacturing processes including diffusion, oxidation, CVD deposition, and dry etching, which are high-temperature processes.
Performance Requirements:
High temperature resistance, corrosion resistance, and low impurity content.
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No.5177 Qianghua West Road, Dongqian Street, Nanxun District, Huzhou City, Zhejiang Province
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+86-572-3032373
+86-572-3033016
The 8 inch fused silica reaction tube is engineered for use in high-temperature semiconductor and photovoltaic processing applications, including diffusion, oxidation, LPCVD, and thermal annealing. Made from ultra-pure fused silica, it offers superior thermal stability, exceptional resistance to corrosive gases, and minimal contamination risk—making it ideal for cleanroom-level operations.
Its precisely controlled dimensions and ultra-smooth inner surface ensure uniform gas flow and temperature distribution, promoting consistent wafer processing and high film quality. The tube’s excellent resistance to thermal cycling reduces deformation and extends service life, supporting uninterrupted furnace performance over extended production runs.
